Title of article
Periodic error calculation from spectrum analyzer data
Author/Authors
Kim، نويسنده , , Hyo Soo and Schmitz، نويسنده , , Tony L.، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2010
Pages
13
From page
218
To page
230
Abstract
This paper describes the Monte Carlo evaluation of a single equation that can be used to determine periodic error magnitudes from spectrum analyzer data. In this approach, the optical interference signal is recorded during constant velocity target motion using a spectrum analyzer and the magnitudes of the individual periodic error contributors are used to calculate error magnitudes. This study builds on prior work by treating the general case where both first and second order error components exist and arbitrary initial phase values are considered. Significant experimental results are presented which verify the new approach.
Keywords
Interferometry , DISPLACEMENT , Periodic error , Nonlinearity , Frequency , Monte Carlo
Journal title
Precision Engineering
Serial Year
2010
Journal title
Precision Engineering
Record number
1429435
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