• Title of article

    Periodic error calculation from spectrum analyzer data

  • Author/Authors

    Kim، نويسنده , , Hyo Soo and Schmitz، نويسنده , , Tony L.، نويسنده ,

  • Issue Information
    فصلنامه با شماره پیاپی سال 2010
  • Pages
    13
  • From page
    218
  • To page
    230
  • Abstract
    This paper describes the Monte Carlo evaluation of a single equation that can be used to determine periodic error magnitudes from spectrum analyzer data. In this approach, the optical interference signal is recorded during constant velocity target motion using a spectrum analyzer and the magnitudes of the individual periodic error contributors are used to calculate error magnitudes. This study builds on prior work by treating the general case where both first and second order error components exist and arbitrary initial phase values are considered. Significant experimental results are presented which verify the new approach.
  • Keywords
    Interferometry , DISPLACEMENT , Periodic error , Nonlinearity , Frequency , Monte Carlo
  • Journal title
    Precision Engineering
  • Serial Year
    2010
  • Journal title
    Precision Engineering
  • Record number

    1429435