The study on precision positioning system of two-dimensional platform based on high speed and large range

The aim of this paper is to improve the positioning accuracy of precision positioning system of two-dimensional based on high speed and large range which is driven by linear motor. According to the influence of intrinsic parameters and external disturbance, a fuzzy-neuron self-adaptive and weighted PID control system has been studied out, among them, intrinsic parameters contain nonlinearity of linear motor system, end-effect and so on. The experimental results show that static positioning precision and dynamic performance of fuzzy-neuron self-adaptive and weighted PID control system is better than traditional PID control system while it is running at high speed. As the positioning precision of precision positioning system of two-dimensional based on high speed and large range which is driven by linear motor has been improved, the positioning precision in the range of 300 mm × 300 mm has reached sub-micron, and the repeated positioning accuracy is less than 1 μm.