Method for evaluating the electrical and mechanical characteristics of a voice coil actuator

A method is proposed for evaluating the electrical and mechanical characteristics of a voice coil linear actuator during motion. The force generated by the actuator is measured as the inertial force of the mass levitated with sufficiently small friction using an aerostatic linear bearing and connected to the moving part of the actuator. During the measurement, the Doppler shift frequency of the laser beam reflected by the mass is measured with a high accuracy using an optical interferometer. Subsequently, the velocity, position, acceleration, and inertial force of the mass are calculated using this frequency. Simultaneously, the current and voltage supplied to the actuator are measured.