Title of article
Processing of hollow micro- and nanostructures using the hydrophilic nature of MgO
Author/Authors
Zolotaryov، نويسنده , , A. and Bachmann، نويسنده , , J. and Montero-Moreno، نويسنده , , J.M. and Pitzschel، نويسنده , , K. and Nielsch، نويسنده , , K.، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2011
Pages
4
From page
496
To page
499
Abstract
We show that covering the water-saturated MgO surface with an Al2O3 film using atomic layer deposition and then annealing it at 400 °C leads to plastic deformation of alumina by trapped water vapor with consequent development of hollow structures. This phenomenon is applied to thin films, nanopatterned surfaces and isolated 3D nanostructures.
Keywords
atomic layer deposition , Lithography , Hollow nanostructures , Heat treatment
Journal title
Precision Engineering
Serial Year
2011
Journal title
Precision Engineering
Record number
1429638
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