• Title of article

    Fabrication and performance of free-standing hydrogen gas sensors

  • Author/Authors

    Houlet، نويسنده , , Lionel Fabrice and Shin، نويسنده , , Woosuck and Nishibori، نويسنده , , Maiko and Izu، نويسنده , , Noriya and Itoh، نويسنده , , Toshio and Matsubara، نويسنده , , Ichiro، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2008
  • Pages
    9
  • From page
    1
  • To page
    9
  • Abstract
    We present fabrication and performance of a free-standing thermoelectric and catalytic hydrogen gas sensor. The response of the device to hydrogen gas is reported at different operating temperatures and hydrogen concentrations. The response of the free-standing device is also compared to the devices built with either a single large membrane or two membranes. At an operating temperature of 100 °C, the free-standing type device shows the voltage response twice as high as those of the membrane type devices. The results show that the thermal differential in the thermoelectric film of the free-standing type device is greatly enhanced as the heat diffusion through the membrane is prohibited. The free-standing type device shows good stability above 60 °C and is selective for hydrogen against methane and propane gases.
  • Keywords
    Free-standing , Hydrogen , Micro-sensor , Catalyst , SiGe , thermoelectric
  • Journal title
    Sensors and Actuators B: Chemical
  • Serial Year
    2008
  • Journal title
    Sensors and Actuators B: Chemical
  • Record number

    1435263