Title of article
Al2O3-coated microcantilevers for detection of moisture at ppm level
Author/Authors
Shi، نويسنده , , Xiaolei and Chen، نويسنده , , Qi-Cheng Fang، نويسنده , , Ji and Varahramyan، نويسنده , , Koday and Ji، نويسنده , , Hai-Feng، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
5
From page
241
To page
245
Abstract
We have demonstrated that the Al2O3-modified microcantilevers (MCLs) can be used to detect low level of moisture. The detection limit for moisture in nitrogen was 10 ppm. The MCLs’ response time to moisture was less than 3 min. The sensors were stable for months stored under ambient conditions. The bending amplitudes were proportional to the moisture level and temperature, and the detection of moisture was not affected by alcohols in the environment.
Keywords
microcantilever , Sensors , Moisture , natural gas , Aluminum oxide , Al2O3
Journal title
Sensors and Actuators B: Chemical
Serial Year
2008
Journal title
Sensors and Actuators B: Chemical
Record number
1435299
Link To Document