Title of article
Hydrogen sensors: Role of palladium thin film morphology
Author/Authors
RaviPrakash، نويسنده , , J. and McDaniel، نويسنده , , A.H. and Horn، نويسنده , , M. and Pilione، نويسنده , , L. and Sunal، نويسنده , , P. and Messier، نويسنده , , R. and McGrath، نويسنده , , R.T. and Schweighardt، نويسنده , , F.K.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
8
From page
439
To page
446
Abstract
The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H2 in H2/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H2 in presence of CO.
Keywords
Hydrogen , PALLADIUM , Sensor , Thin film , morphology , CARBON MONOXIDE
Journal title
Sensors and Actuators B: Chemical
Serial Year
2007
Journal title
Sensors and Actuators B: Chemical
Record number
1435560
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