Title of article
Gas sensing properties of WO3 thin films deposited by rf sputtering
Author/Authors
Khatko، نويسنده , , Viacheslav and Vallejos، نويسنده , , Stella and Calderer، نويسنده , , Josep and Llobet، نويسنده , , Eduard and Vilanova، نويسنده , , Xavier and Correig، نويسنده , , Xavier، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
6
From page
400
To page
405
Abstract
WO3 thin films were deposited by reactive radio frequency (rf) sputtering from a pure tungsten target. The deposition process was conducted with three interruptions and the interruption time was 30, 90 and 300 s. On the basis of these films, sensing layers were prepared and their responses to NO2, ammonia and ethanol were investigated. It was found that the sensing layers prepared with an interruption time of more than 90 s showed the best sensing properties.
Keywords
WO3 thin film , Deposition with interruptions , Gas sensing properties
Journal title
Sensors and Actuators B: Chemical
Serial Year
2007
Journal title
Sensors and Actuators B: Chemical
Record number
1436974
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