Single step deposition of different morphology ZnO gas sensing films

Al-doped ZnO thin films were deposited onto fixed silicon substrates by dc reactive sputtering. The inherent lateral inhomogeneity in the deposited film with areas of different morphology and sheet resistance revealed different sensing properties. This novel approach offers the possibility of controllable deposition of ZnO sensing layers for the simultaneous manufacturing of sensors with different properties in an array in a single technological step.