Tin oxide thin films prepared by aerosol-assisted chemical vapor deposition and the characteristics on gas detection

Pure and Cu-doped SnO2 thin films are prepared by aerosol-assisted chemical vapor deposition for H2S detection. Three doping routes are used to prepare thin films with different structures. The response and recovery characteristics are analyzed. The thin film is able to completely recover between testing cycles at room temperature and has the response and recovery times of 60 and 90 sec, respectively. The selectivity test illustrates that the film is only sensitive to H2S and acts no response to CO and CH4 at all. The relationships between response and gas concentration as well as operating temperature are also discussed.