Title of article
Room-temperature CO2 sensing using metal–insulator–semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films
Author/Authors
Jinesh، نويسنده , , K.B. and Dam، نويسنده , , V.A.T. and Swerts، نويسنده , , J. and de Nooijer، نويسنده , , C. and van Elshocht، نويسنده , , S. and Brongersma، نويسنده , , S.H. and Crego-Calama، نويسنده , , M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2011
Pages
7
From page
276
To page
282
Abstract
Room temperature detection of CO2 using metal–insulator–silicon (MIS) devices is reported. These devices comprise atomic layer deposited La2O3 thin films as the gas-sensitive dielectric layer and Pt, Pt/Ta and Al as the electrodes. Physical mechanisms that lead to the detection of CO2 at room temperature are discussed.
Keywords
CO2 sensing , atomic layer deposition , La2O3 thin films
Journal title
Sensors and Actuators B: Chemical
Serial Year
2011
Journal title
Sensors and Actuators B: Chemical
Record number
1439353
Link To Document