Title of article
Zeolite-coated interdigital capacitors for humidity sensing
Author/Authors
Urbiztondo، نويسنده , , M. and Pellejero، نويسنده , , I. and Rodriguez، نويسنده , , A. and Pina، نويسنده , , M.P. and Santamaria، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2011
Pages
10
From page
450
To page
459
Abstract
Inter-digital capacitors (IDCs) with electrode gaps of 10 or 50 microns have been coated with zeolite films consisting of different zeolites with Si/Al ratios ranging from 1.5 (zeolite A) to infinite (silicalite). The performance of the sensor in the measurement of humidity has been related to the electrical properties of the zeolites (relative permittivity, ɛr), which in turn is a function of their Si/Al ratio. With zeolites of a high Al content the limit of detection was under 0.5 ppmV.
Keywords
Interdigital capacitors (IDC) , Zeolite , humidity sensors
Journal title
Sensors and Actuators B: Chemical
Serial Year
2011
Journal title
Sensors and Actuators B: Chemical
Record number
1439680
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