Gas sensors based on gravimetric detection—A review

These last 10 years, smaller, less expensive, and higher performance sensors are required for gas sensing applications. To date no true detection principle has been recognized as the best candidate for such application. Microsytems or Micro/Nano ElectroMechanical Systems (M/NEMS) used as gravimetric detectors are among the probable candidates. The technology can indeed be manufactured en masse and can provide multi-gas analysing platform. In this paper, we present a comprehensive overview of micro/nano sensors based on the gravimetric effect to detect an absorbed gas on top of their surfaces. The paper provides a comparison between different electromechanical devices (Bulk Acoustic Wave, Surface Acoustic Wave, Capacitive Micro-machined Ultrasonic Transducer, Micro/Nano cantilevers) with an introduction to gas adsorption mechanisms, material selection, detection principles and design guidance useful to researchers or engineers.