Single-cell trapping and impedance measurement utilizing dielectrophoresis in a parallel-plate microfluidic device

This paper integrates fluid manipulation, single-cell trapping, and single-cell impedance measurement into a parallel-plate chip. Liquid dielectophoresis (LDEP) and dielectrophoresis (DEP) are utilized to manipulate a sucrose solution and HeLa cells in a chip, respectively. The sucrose solution with HeLa cells is transported by LDEP. A cell is trapped by DEP and then its impedance is measured in an SU-8 cavity between measurement electrodes. Finite element analysis (FEA) is used to optimize the microstructure of the SU-8 cavity.