Title of article
Rugate-structured free-standing porous silicon-based fiber-optic sensor for the simultaneous detection of pressure and organic gases
Author/Authors
Cho، نويسنده , , So-Yeon and Lee، نويسنده , , Ki-Won and Kim، نويسنده , , Jae-Wan and Kim، نويسنده , , Dong-Hyun، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
6
From page
428
To page
433
Abstract
Rugate-structured free-standing porous silicon was used as a membrane for a fiber-optic sensor. This material was suitable as a pressure sensitive membrane because it showed a strong peak in the reflectance spectrum which can be used for sensor signal processing and because its elasticity modulus could be easily controlled. The membranes showed an effective response in a low pressure range between 0.0 and −20.0 kPa. In addition, the membranes showed multiple responses to organic gases as well as different pressures due to their gas-sensing capability imparted by their highly porous structure.
Keywords
Pressure sensor , Lateral pressure difference , Fiber optics sensors , Rugate-structured free-standing porous silicon , Pressure sensitive membrane , Porous silicon , Photonic bandgap materials
Journal title
Sensors and Actuators B: Chemical
Serial Year
2013
Journal title
Sensors and Actuators B: Chemical
Record number
1442237
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