Title of article
Characterization of metal-oxide nanosensors fabricated with focused ion beam (FIB)
Author/Authors
Hernلndez-Ramيrez، نويسنده , , F. and Rodrيguez، نويسنده , , J. and Casals، نويسنده , , O. and Russinyol، نويسنده , , E. and Vilà، نويسنده , , A. and Romano-Rodrيguez، نويسنده , , A. Belleni Morante، نويسنده , , J.R. and Abid، نويسنده , , M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
6
From page
198
To page
203
Abstract
A procedure to contact single metal-oxide nanowires and nanoparticles of different materials using a Dual Beam FIB has been developed. The quality of the electrical contacts has been evaluated and the possibility of extracting the electrical parameters of these nanowires and nanoparticles demonstrated. The response of some of them to different gases is presented, proving the feasibility of fabricating metal-oxide nanosensors.
Keywords
Metal-oxide , FIB , Gas nanosensors
Journal title
Sensors and Actuators B: Chemical
Serial Year
2006
Journal title
Sensors and Actuators B: Chemical
Record number
1443229
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