Title of article
Integrated high temperature gas sensor system based on bulk acoustic wave resonators
Author/Authors
Richter، نويسنده , , D. and Fritze، نويسنده , , H. and Schneider، نويسنده , , T. and Hauptmann، نويسنده , , P. and Bauersfeld، نويسنده , , N. and Kramer، نويسنده , , K.-D. and Wiesner، نويسنده , , K. and Fleischer، نويسنده , , M. and Karle، نويسنده , , G. and Schubert، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
6
From page
466
To page
471
Abstract
A high temperature gas sensor system based on bulk acoustic wave resonators is developed. The system consists of CeO2 coated langasite resonators with a special electrode design to detect mechanical and conductivity changes in the sensor film. The data acquisition is performed using a specialized compact impedance analyser and a data processing software using methods of computational intelligence. The system is tested in different atmospheres containing mixtures of CO and H2 and exhibits selectivity to these gases.
Keywords
High temperature microbalance , Resonant gas sensor , Impedance analyser , Langasite
Journal title
Sensors and Actuators B: Chemical
Serial Year
2006
Journal title
Sensors and Actuators B: Chemical
Record number
1443270
Link To Document