• Title of article

    A New Unconditionally Stable Algorithm for Steady-State Fluid Simulation of High Density Plasma Discharge

  • Author/Authors

    Choe، نويسنده , , Hee-Hwan and Yoon، نويسنده , , N.S. and Kim، نويسنده , , S.S. and Choi، نويسنده , , Duk-In، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    12
  • From page
    550
  • To page
    561
  • Abstract
    A new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge is suggested. The physical origin of restriction on simulation time step is discussed and a new method to overcome it is explained. To compare the new method with previous other methods, a one-dimensional fluid simulation of inductively coupled plasma discharge is performed.
  • Journal title
    Journal of Computational Physics
  • Serial Year
    2001
  • Journal title
    Journal of Computational Physics
  • Record number

    1476542