Coupling kinetic Monte-Carlo and continuum models with application to epitaxial growth

We present a hybrid method for simulating epitaxial growth that combines kinetic Monte-Carlo (KMC) simulations with the Burton–Cabrera–Frank model for crystal growth. This involves partitioning the computational domain into KMC regions and regions where we time-step a discretized diffusion equation. Computational speed and accuracy are discussed. We find that the method is significantly faster than KMC while accounting for stochastic fluctuations in a comparable way.