Optimization of an industrial DC magnetron sputtering process for graded composition solar thermal absorbing layer

Optimization of an industrial DC magnetron sputtering process for thin graded index coatings for solar thermal absorbers is reported. The optimization concerned the main processing parameters: sputtering power, argon flow, oxygen flow, and system set-up for graded control. The purpose of the optimization was to achieve a surface with efficient solar-thermal energy conversion based on the concept graded index coating, using a metal-dielectric composite coating of nickel–nickel oxide with a continuous change in composition through the film depth profile. It was found that the optimization of the materials composition could be controlled by one parameter related to the sputtering process, the relative oxygen flow RO, defined as the ratio of applied oxygen flow to the critical oxygen flow. For optimized sputtering conditions a solar absorptance of 0.92 was obtained for a single graded index coating on aluminum for RO value of 0.8. From the materials characterization it was found that this gave a graded index coating of two thick sub-layers, a top layer of nano-sized nickel oxide grains and a base layer of nano-size metallic nickel grains with a very thin interface of a mixture of nickel and nickel oxide that was almost amorphous.