• Title of article

    Optimal design of a high pressure organometallic chemical vapor deposition reactor

  • Author/Authors

    Bachmann، نويسنده , , K.J. and Banks، نويسنده , , H.T. and Hِpfner، نويسنده , , C. and kepler، نويسنده , , G.M. and LeSure، نويسنده , , S. and McCall، نويسنده , , S.D. and Scroggs، نويسنده , , J.S.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    16
  • From page
    65
  • To page
    80
  • Abstract
    A team composed of material scientists, physicists, and applied mathematicians have used computer simulations as a fundamental design tool in developing a new prototype High Pressure Organometallic Chemical Vapor Deposition (HPOMCVD) reactor for use in thin film crystal growth. Early design of the HPOMCVD reactor dramatically evolved long before any physical reactor was built. This effort offers a strong endorsement of such multidisciplinary, computationally based modeling teams in the design of new products in areas of emerging technologies where heretofore extensive and costly experimental design was the central paradigm.
  • Journal title
    Mathematical and Computer Modelling
  • Serial Year
    1999
  • Journal title
    Mathematical and Computer Modelling
  • Record number

    1591355