Microstructure analysis of zirconium carbide layer on pyrocarbon-coated particles prepared by zirconium chloride vapor method

Zirconium carbide (ZrC) layer on pyrocarbon-coated particles was successfully prepared in a fluidized bed coater furnace by chemical vapor deposition using a zirconium chloride (ZrCl4) vapor method and quantitative controlling of the Zr-source through a ZrCl4 powder feeder. The crystal phase, microstructure and chemical composition of ZrC-coating layer were analyzed using X-ray diffraction (XRD), optical metallographical microscope, scanning electron microscope (SEM), transmission electron microscope (TEM), high-resolution transmission electron microscope (HR-TEM) and X-ray photoelectron spectroscopy (XPS). The results show that the deposited ZrC-coating layer has smooth and compact surface, no obvious holes, clear interface with dense pyrocarbon layer, and a thickness of 35 μm. The main phase of ZrC-coating layer is fcc-ZrC crystal, which is composed of small grains with the size of 20–50 nm. The grain size increases monotonously with the deposition temperature increasing. The main elements of ZrC-coating layer are Zr and C, and the Zr/C molar ratio is close to 1:1. The analysis of composition and crystal structure suggest that a stoichiometric fcc-ZrC crystal was obtained and no obvious preferred orientation of the grains was found.