Nano-patterning of a TiO2-organic hybrid material using interference of surface plasmon on aluminum

Nano patterns of a TiO2-organic hybrid material have been fabricated by interference of surface plasmon on aluminum. The TiO2-organic hybrid materials were prepared by the sol–gel method, and were irradiated through an aluminum mask by a UV light. After the unreacted parts were removed, patterns were obtained on the films. The patterns of lines approximately 300 nm in width and with a sub-100-nm height were obtained by controlling the UV irradiation time. It was confirmed that the patterns changed to anatase patterns by sintering at temperatures above 450 °C.