Towards a hybrid micro-device allowing the selective detection of hydrogen fluoride vapours in a complex mixture

In this work, design and fabrication of a hybrid micro-device dedicated to the selective detection of hydrogen fluoride vapours is reported. This micro-device is composed by a gas chromatographic micro-column positioned in front of a tin dioxide-based gas sensor. The efficiency of this hybrid micro-system regarding to reproducibility and reversibility for various HF concentrations was investigated. The influence of the HF concentration on the electrical responses of the sensor is also studied. The experimental results show that this hybrid micro-system is efficient since it allows the elution, separation and detection of hydrogen fluoride at a low temperature close to ambient.