Development of a new total reflection X‐ray fluorescence instrument using polycapillary X‐ray lens

A new TXRF instrument combined with micro‐XRF analytical technique was proposed. An X‐ray micro‐beam was obtained by using a polycapillary X‐ray lens. The evaluated diameter of the X‐ray beam at the focal distance was 35 μm. In order to satisfy the total reflection condition of the present instrument, we attempted to cut the X‐ray micro‐beam above the critical angle of the total reflection with a slit. After the slit was applied, a clear critical angle could be observed. Using this proposed instrumental setup, we applied this to the analysis of a single particle on a flat Si substrate.