Title of article
Uncovering the transformations that occur during the early stages of TiO2 CVD on Si (A perspective on the article, “TiO2 chemical vapor deposition on Si(111) in ultrahigh vacuum: Transition from interfacial phase to crystalline phase in the reaction limit
Author/Authors
Gladfelter، نويسنده , , Wayne L.، نويسنده ,
Issue Information
هفته نامه با شماره پیاپی سال 2011
Pages
1
From page
1146
To page
1146
Abstract
This perspective offers a brief summary of a series of publications that reveal insight into the nucleation of titanium oxide on different surfaces.
Keywords
chemical vapor deposition , Synchrotron radiation photoelectron spectroscopy , Titanium oxide , Polycrystalline thin films
Journal title
Surface Science
Serial Year
2011
Journal title
Surface Science
Record number
1686093
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