Simulation of sputtering induced by light ions

A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. s on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.