Fast measurement of rocking curve of reflection high-energy electron diffraction by using quasi-1D convergent beam

In order to investigate dynamic change in surface structure, we tried to measure the rocking curve of reflection high-energy electron diffraction (RHEED) by using a quasi-1D convergent beam method, which means a superposition of a hundred RHEED patterns at different glancing angles on one image. After we have checked the experimental accuracy, it is confirmed that the measurement time is shortened to 0.3 s by using this method. We also show an application of this method to a real time observation of surface segregation of B atoms while a highly B-doped Si is annealed.