Thermal decomposition of ethylene on Si(1 1 1): Formation of the Si(1 1 1):carbon structure

Adsorption and thermal decomposition of ethylene on Si(1 1 1) have been studied by photoelectron spectroscopy. The evolution of the C 1s and Si 2p core-levels upon the adsorption of the ethylene and the formation of C-incorporated surfaces by thermal annealing is analyzed, from which the unique chemical and structural properties of 3 × 3 reconstructed phase can be derived. We also discuss the coverage of the C atoms involved and their position on the 3 × 3 surface in terms of a structure model.