Scattering of 300 K effusive D2 beams from the H/Si(1 0 0) surface

Scattering of 300 K effusive D2 beam from H/Si(1 0 0) surfaces has been investigated in the dynamics experiments on angular and velocity distributions of scattered molecules. The results are compared with that of the He scattering which is governed mostly by the direct inelastic scattering (DIS). Although the angular distribution of D2 molecules is nearly cosine but it includes considerable contribution of DIS. This may be explained in terms of the geometrical corrugation of D2–Si surface interaction potential.