Vitreous tin oxide-based thin film electrodes for Li-ion micro-batteries

Sputter deposited thin films from a Sn/(SnO)(B2O3)0.3(P2O5)0.2 composite target are investigated as an alternative to the lithium metal anode for lithium-ion micro-batteries. Experimental conditions related to the manufacturing of the target and elaboration of the vitreous thin films are described. Chemical and physical properties of the thin layer films are presented. Regarding the electrochemical behavior, vitreous tin oxide-based thin films were found to be able to store and reversibly exchange lithium ions evidencing the feasibility of the thin film electrode concept.