Hydrogen content analysis in hydrogen-charged PZT ferroelectric ceramics

PbZrxTi(1 − x)O3 (PZT) ferroelectric ceramic samples have been charged with hydrogen at a temperature of 400 °C. The resulting hydrogen depth profiles have been determined both by secondary ion mass spectrometry (SIMS) and nuclear reaction analysis using the 15N beam (N-15 method) at and above the resonance energy of 6.4 MeV. After charging, the hydrogen concentration was found to be increased in the near surface region. The hydrogen concentration determined by the N-15 method revealed that the concentration decreased with increasing fluences. However, at higher fluences the remaining hydrogen concentration was constant and amounts to about half of the value estimated at the lowest fluence. Infrared spectroscopy measurements indicated the existence of a polar hydroxyl bond OH−.