Deposition and characterization of nanocrystalline tetragonal zirconia films using electrostatic spray deposition

Pure tetragonal and nanocrystalline 2 mol.% Y2O3-doped ZrO2 thin films are deposited on stainless steel substrates by electrostatic spray deposition (ESD) technique. Tetragonal phase is evidenced by Raman spectrometry and X-ray diffraction in an as-deposited film at 400°C. Good homogeneity in composition is confirmed using wavelength dispersion scanning. The surface microstructure of dense to porous thin films is investigated varying both deposition parameters: substrate temperature and deposition time.