ZrO2-based thin films synthesized by electrostatic spray deposition: Effect of post-deposition thermal treatments

Cubic and tetragonal Y2O3-doped ZrO2 thin films were deposited with a dense surface morphology by electrostatic spray deposition. Four dependent process parameters – substrate temperature, precursor solution flow rate, nozzle to substrate distance and the deposition time – have been used to control the process. Temperature dependent Raman spectroscopy and X-ray diffraction were performed in order to investigate the crystallization behavior and structural properties.