Title of article
Efficient chemical vapour deposition of hydrocarbon polymeric films by UV laser induced photolysis of 3-butyn-2-one
Author/Authors
Pola، نويسنده , , Josef and Ouchi، نويسنده , , Akihiko and Saito، نويسنده , , Kimitsugu and Ishikawa، نويسنده , , Keiichiro and Koga، نويسنده , , Yoshinori، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
5
From page
279
To page
283
Abstract
ArF and XeCl laser induced photolysis of 3-butyn-2-one in the gas phase affords ethane, buta-1,3-diyne, ethyne and methane as minor gaseous products and a thin film of a carbon-rich organic polymer as a major product. The reaction is suitable for low-temperature chemical vapour deposition of adhesive hydrocarbon films.
Journal title
Chemical Physics Letters
Serial Year
1996
Journal title
Chemical Physics Letters
Record number
1778835
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