Title of article
Vibrational analysis of oxygen-plasma treated indium tin oxide
Author/Authors
He، نويسنده , , P. and Wang، نويسنده , , S.D. and Wong، نويسنده , , W.K. and Cheng، نويسنده , , L.F. and Lee، نويسنده , , C.S. and Lee، نويسنده , , S.T. and Liu، نويسنده , , S.Y.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
4
From page
795
To page
798
Abstract
High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the ‘as-received’ ITO was the loss peaks associated with the CHx group. Oxygen-plasma treatment of ITO led to the disappearance of the CHx loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CHx group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment.
Journal title
Chemical Physics Letters
Serial Year
2003
Journal title
Chemical Physics Letters
Record number
1783415
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