Microfabrication of solenoid-type RF SMD chip inductors with an Al2O3 core

We investigated micron size, high-performance, and solenoid-type radio-frequency surface-mounted device (SMD) chip inductors with a low-loss Al2O3 core for a GHz drive microwave circuit application. Copper coils with a diameter of 27 μm were used and the chip inductors fabricated in this study are 0.86 × 0.46 × 0.45 mm3. The high-frequency characteristics of the inductance (L), quality factor (Q), and impedance (Z) of the developed inductors were measured using a RF impedance/material analyzer (HP4291B with HP16193A test fixture). The developed inductors have a self-resonant frequency of 3.7–5.2 GHz and exhibit L of 15–34 nH. The inductors have Q of 38–49 over the frequency ranges of 900 MHz–1.7 GHz. The calculated data obtained from the equivalent circuit and the derived equation of Q described the high-frequency data of L, Q, and Z of the inductors developed quite well.