Protein patterning using a microstructured organosilane layer fabricated by VUV light lithography as a template

We successfully fabricated a protein pattern using a microstructured organosilane layer fabricated by vacuum ultraviolet light (VUV) lithography and subsequently by chemical modification of organosilane layer for immobilization of proteins. An amino-terminated organosilane layer was formed using aminopropyltriethoxysilane (APTES) by the liquid method on quartz glass. This organosilane layer was patterned by VUV etching through a metal mask. The residual amino groups were chemically modified for immobilization of proteins. Fluorescent protein (ECFP) was immobilized to the chemically modified pattern, and a clear ECFP pattern was confirmed with a fluorescent microscope after the removal of non-specifically bound ECFP. This technique can be applied to almost all the proteins and will be useful for biotechnology, such as neuronal cell arrangement.