Spatial distribution of microdroplets generated in the cathode spots of vacuum arcs

Results of research on the spatial distribution of aerosol generated by the cathode spots of the vacuum-arc evaporators used for wear-resistant coatings deposition are presented in the paper. Research was carried out on four arc plasma sources differing in the cathodeʹs structure and the arc ignition system. The spatial angular distribution for different fractions of microdroplets is presented. The influence of the cathodeʹs shape on conditions of the microdroplets generation is described.