Investigation on characteristics of IDBD plasma

An induced dielectric barrier discharge (IDBD) device is a new type of plasma generator that has been developed in our laboratory. It can work in atmospheric or vacuum conditions. This kind of machine is composed of a plate electrode covered by dielectric material, a web electrode, a metal substrate and a pulse power. Discharge occurs in the region between the medium and web electrode. At the same time, an induced plasma is formed in the region between the web electrode and the metal substrate. Some measurement methods have been used to test the macroscopical behaviors of induced plasma. The testing results showed that: (1) the induced plasma was a stable and uniform plasma, and it could be obtained under atmospheric conditions; and (2) the thickness of the induced plasma was a function of the geometrical parameters of the device and discharge conditions. Some mathematical equations could be used to describe the establishment process and the thickness of the induced plasma.