Structure and tribological properties of MoSx coatings prepared by bipolar DC magnetron sputtering

MoSx coatings were prepared by bipolar pulse DC (balanced and unbalanced) magnetron-sputtering systems. Deposition parameters, cathode current density, argon pressure, bias voltage and magnetron sputtering conditions, were varied in order to obtain low friction and wear-resistant coatings. Composition and surface morphology were determined by energy dispersive X-rays and scanning electron microscopy, while the structure was investigated by X-ray diffraction. The friction and wear properties were investigated by fretting tests in ambient air of <10% and 50% relative humidity. On proper selection of the argon pressure and the cathode current density, MoSx coatings characterised by a strong (002) basal plane orientation parallel to the substrate were obtained in a reproducible way. Such coatings deposited under optimised conditions exhibit very good lubricity and high wear-resistance, even in ambient air with a relative humidity of 50%. Conversely, when deposition parameters such as higher argon pressure and larger cathode current density result in the deposition of a MoSx coatings with a needle-like structure and preferential (100) and (110) plane orientations, a lower wear resistance is achieved especially in air of 50% relative humidity. Ion bombardment, achieved by applying a negative voltage bias or unbalanced sputtering conditions, improves the friction and wear performance. Conversely, a positive bias voltage deteriorates the tribological performance of the coatings. Experimental data on the friction and sliding wear resistance for MoSx coatings indicate that the best tribological properties are obtained with low sulfur and featureless MoSx coatings.