Effects of plasma ion implantation from cathodic arc plasmas

Plasma ion implantations from cathodic arc plasmas of the Ti–Si–N and Ti–B–N systems are performed into hardened high speed steel with pulsed bias voltages of −5 to −20 kV at working gas pressures of 10−2 and 4×10−3 mbar as well as at substrate temperatures of 200 and 300°C. The samples are characterized by tribological investigations. Coatings deposited with substantially shuttered direct particle impact from the cathodic arc source show the highest wear resistance.