Investigation of non-hydrogenated DLC:Si prepared by cathodic arc

Non-hydrogenated diamond-like carbon (DLC) films (also referred as ta-C) have been extensively studied and are used for a variety of wear related applications. Alloying DLC with refractory metals and other elements have been shown to be promising techniques to overcome some of the problems associated with pure DLC, such as excessive level of intrinsic stresses and high-temperature stability. The microstructure of DLC:Me in general consists of crystalline metal carbides dispersed in a DLC matrix. In contrary, DLC:Si has an amorphous structure. We have used filtered cathodic arc to prepare DLC:Si up to 6% Si, and have characterized their structure and bonding using transmission electron microscopy and X-ray absorption spectroscopy. The effect of Si in changing the bonding configuration of the C network is discussed. The microstructure is then correlated to hardness and friction measured by nano-indentation and micro-wear.