A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering

Understanding the mode of transport of water vapor through the film is important for improving the moisture barrier properties of metallized porous papers. For the synthesis of Al metallized porous papers, it was carried out by DC planar magnetron sputtering with various target power densities and film thickness. To correlate film characteristics with moisture barrier properties, film properties were determined by X-ray diffraction, scanning electron microscopy, Auger electron spectroscopy and evaluations of water vapor permeability (WVP). It changed preferred orientations from Al(1 1 1) to α-Al2O3(1 1 0) reacted with thermal activated oxygen from the paper as film thickness increase and the minimum WVP mean is 2.16×10−7 g mm/m2 h kPa at 6.3 W/cm2, 2 μm and the maximum is 2.00×10−8 g mm/m2 h kPa at 1.2 W/cm2, 0.2 μm.