Modelling of inductively coupled multi-component plasmas

A compact model for boundary sheaths in inductively coupled plasmas (ICP) is presented. It unifies physical accuracy with computational efficiency. This model takes the fluxes of all incoming species as input parameters. It returns plasma parameters like the particle densities, velocities and the electric field at the cut edge between plasma bulk and sheath. The model can handle inductive sheaths with multiple positive ionic species. The hydrodynamic treatment of plasma sheaths is physically accurate as it takes into account the effects of ion inertia in the sheaths. However, for multi-component plasmas the solution of the full hydrodynamic model consumes an inacceptable amount of time even on todayʹs computers. This compact model offers the possibility to increase efficiency without loss of accuracy. It is based on the hydrodynamic equations and consists of a small algebraic system, which can be solved very efficiently.