• Title of article

    Speed Pack: an innovative production method for high-quality PVD coating materials

  • Author/Authors

    Schنff، نويسنده , , W. and Güther، نويسنده , , V. and v. Osten، نويسنده , , U. and Sérole، نويسنده , , B.P.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    3
  • From page
    655
  • To page
    657
  • Abstract
    GfE has introduced the innovative ‘Speed Pack’ (SP) process to its manufacturing technologies for high-quality PVD coating materials for thin-film applications. It is shown that the coating materials produced by SP have several crucial benefits for PVD coating technology, as they provide an extremely fine and homogenous microstructure with density values of approximately 99.5% of the theoretical density. Concerning the composition and target size, the SP process is outstanding due to its flexibility. Due to the large target dimensions possible in one segment, a more continuous coating process can be achieved. Moreover, a metallic backing plate can be simultaneously joined to the target material. Thus, both an excellent mechanical connection and metallurgical bonding by diffusion can be realised, which guarantees optimised heat transfer.
  • Keywords
    Speed Pack , Physical vapour deposition (PVD) coating material , Arc evaporation cathodes , Sputtering targets , Single-segmented targets
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2003
  • Journal title
    Surface and Coatings Technology
  • Record number

    1806604