Microstructure transformation and interface structure of Co/Pt nano-multilayers prepared by ion beam sputtering deposition (IBSD)

The composition-modulated structure, interface structure and structure transformation of Co/Pt nano-multilayers prepared by ion beam sputtering deposition (IBSD), a kind of high-energy processing, were systematically studied by AES, TEM and low-angle and high-angle XRD. The AES results show that the interface of Pt/Co multilayers deposited at room temperature is steady, smooth and abrupt and there is no evidence of Co0.33Pt0.67 alloy formed at the interface between the pure Co and Pt layers. For the Co/Pt binary system, the formation of a Co–Pt alloy is strongly dependent on the energy of the adatoms. The microstructure of Co/Pt nano-multilayers critically depends on the thickness of the pure Co and Pt layers, the period, the total thickness and the modulated number of Co/Pt multilayers. The definitive factor which influences the structure of Co/Pt multilayers is the stress induced by the mismatch between Co and Pt.