Ti–Si–C sputter deposited thin film coatings

Design concept of novel, wear resistant and low friction nanocomposite materials is based on the formation of two- or multi-phase systems, which show a thermodynamically driven segregation into nanophase with the grain size in nanometer scale. Combination of materials (phases) in the single coating results in new properties, which can meet an increasing level of requirements in modern applications. Thin film, Ti–Si–C system based coatings were deposited from elemental targets (Ti, Si) by double-source reactive, pulsed magnetron sputtering on steel substrates. Their structure, chemical and phase composition as well as pin-on-disc tested tribological properties were studied.