Title of article
Characterization of a microwave discharge by thermography
Author/Authors
Susanne Kytzia، نويسنده , , S. and Korzec، نويسنده , , D. and Schmidt، نويسنده , , M. and Engemann، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
5
From page
769
To page
773
Abstract
The slot antenna (SLAN) type microwave plasma source is characterized by use of thermography. The influence of microwave power (2.45 GHz, 600–1400 W), gas pressure (5–10 mbar) and oxygen flow (500–1500 sccm) on symmetry of the temperature profile along the axis of the cylindrical plasma chamber is investigated. The thermography results are compared with axial Langmuir probe measurements and with results of the electricfield simulations, for which the plasma is modelled by use of Drude model.
Keywords
Microwave simulation , Infrared thermography , Microwave discharge
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1810219
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