Title of article
Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge
Author/Authors
de Poucques، نويسنده , , L. and Imbert، نويسنده , , J.C. and Vasina، نويسنده , , P. and Boisse-Laporte، نويسنده , , C. and Teulé-Gay، نويسنده , , L. and Bretagne، نويسنده , , J. and Touzeau، نويسنده , , M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
800
To page
803
Abstract
While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficiency of these two devices in the same reactor chamber.
Keywords
IPVD , sputtering , Microwave discharge , RF discharge , Absorption spectroscopy
Journal title
Surface and Coatings Technology
Serial Year
2005
Journal title
Surface and Coatings Technology
Record number
1810232
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